Innovations in EUV Light Source: The Transition to Three Laser Pulses

While attending an ASML presentation at SEMICON Korea, I noticed a tidbit on one of the slides. A key part of their future EUV roadmap has been growing the power source to 800 watts or more. But it had not been super clear to me how they were going to do that, other than maybe raising the speed of the tin pellets. Then I saw the slide and it showed something new, at least to me. Three laser pulses rather than two. Now how about that? No, this is not an Onion article. This looks to be real. In this video, I want to talk about lasers and EUV light sources. And how three is better than two.

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