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China’s “New” EUV Light Source

Asianometry

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Exploring the Evolution of EUV Light Sources and China's New Developments

This chapter explores various EUV light source technologies, focusing on China's Laser Induced Discharged Plasma (LDP) system and its comparison to ASML's Laser Produced Plasma (LPP). The discussion examines their efficiencies, design hurdles, and what the future may hold for EUV technology in China amid competitive dynamics.

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