Asianometry How the EUV Mirrors are Made
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Apr 6, 2025 Dive into the intricate world of EUV mirror fabrication, where precision is key in semiconductor technology. Learn about the astonishing challenge of achieving lambda/50 wavefront error with mirrors that must be more accurate than hydrogen atoms! Discover the historical advancements that shaped today's manufacturing processes and the brilliant innovators who drove these breakthroughs. The quest for perfect optics is not just about technology; it’s a thrilling journey of science and engineering.
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EUV Mirror Precision
- EUV lithography requires extreme precision in mirror polishing due to the small wavelength of EUV light.
- Each mirror in a six-mirror EUV system must have a surface accuracy of 53 picometers RMS, comparable to the radius of a hydrogen atom.
Bragg Reflectors and Interference
- The Bragg equation explains how X-rays reflect off crystalline solids, and it involves constructive and destructive interference.
- Bragg reflectors, which use multiple alternating reflective layers, can achieve higher reflectivity by constructive interference.
EUV Mirror Construction
- EUV mirrors use alternating layers of materials with high and low atomic numbers to maximize reflectivity.
- The layers must be precisely deposited, and even small deviations can significantly reduce reflectivity.