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TSMC's Incredible 2nm Curvy Masks

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Nov 3, 2025
TSMC's groundbreaking 2nm process node introduces Gate-All-Around transistors alongside innovative curvilinear photomasks. These curved masks are a game-changer, enhancing the manufacturing capabilities for GPUs. The podcast dives into the complexities of photolithography, resolution challenges at smaller nodes, and how inverse lithography technology is changing the mask-making landscape. With advancements in multi-beam mask writers and the demand from AI accelerator chips, the future of semiconductor manufacturing looks promising!
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INSIGHT

Masks Are Precious And Vulnerable

  • Photomasks are extremely valuable and fragile, with full sets costing tens of millions and holding critical IP.
  • Mask shops face environmental and magnetic risks that can ruin a mask and costly wafer runs.
INSIGHT

RETs Bridge Optical Limits

  • Optical limits force use of resolution enhancement techniques (RETs) as wavelengths can't shrink every node.
  • RETs evolved from simple heuristics to complex computed adjustments to improve printed fidelity.
INSIGHT

ILT Generates Curved, Optimal Masks

  • Inverse lithography technology (ILT) computes mask patterns backwards from desired wafer images, producing curved, non-intuitive masks.
  • ILT dramatically widens the process window but historically produced alien, curve-rich masks.
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