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ep31 - Miroslav Krstić: nonlinear adaptive control, PDEs, delays, extremum seeking, safety, neural operators for control

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Maximizing Light Intensity in Semiconductor Technology

This chapter explores the integration of methodologies in photolithography and semiconductor tech, focusing on extreme ultraviolet light's role in shrinking chip transistors. It highlights the breakthrough control technique that enhanced light intensity and its significance for a major semiconductor acquisition.

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